114 nm
| Model | Vacuum Ultraviolet Pulsed114 nm (11eV) Laser | |
| Photon energy | 10.897 eV（113.785 nm） | |
| Pulse duration | UV-2：< 50 psec、UV-3：< 20 psec | |
| Repetition rate | UV-2：< 0.5〜5 MHz、UV-3：< 50 MHz | |
| Average power | 5.7×10E12 photons/sec | |
| Polarization | Liner/horizontal | |
| Beam size at sample | < 0.25 mm FWHM | |
| Beam height | < 4.00 “(101.6 mm) |
