114

Model | Vacuum Ultraviolet Pulsed114nm(11eV) Laser | |
Photon energy | 10.897 eV(113.785 nm) | |
Pulse duration | UV-2:< 50 psec、UV-3:< 20 psec | |
Repetition rate | UV-2:< 0.5〜5 MHz、UV-3:< 50 MHz | |
Average power | 5.7×10E12 photons/sec | |
Polarization | Liner/horizontal | |
Beam size at sample | < 0.25 mm FWHM | |
Beam height | < 4.00 “(101.6 mm) |