QCW Kalama
(193 nm/ 200mW)

PRODUCTS

QCW Kalama
(193 nm/ 200mW)

レーザ

QCW レーザ

波長 193nm、繰り返し 50 MHz、平均出力 0.2 W 超を実現した全固体深紫外ピコ秒レーザです。
当社が長年培ってきた波長変換技術と高品質 CLBO 結晶を駆使し、高出力且つ短波長化を全個体レーザで実現しました。
従来のウエハ検査に加え、ArF リソグラフィ用フォトマスク検査、医療分野、光学素子検査用光源としての応用が可能です。

資料ダウンロード

お問い合わせ

仕様

CW/Pulse	Pulse

波長	193 nm

出力	200 mW

消光比	> 100:1

ビーム品質	M2 < 1.5

偏光方向	Horizontal

ビーム直径	3 mm ±0.3 mm

供給電源	AC 200-240 V, 50/60 Hz

消費電力	< 3 kW

冷却方式	水冷式

寸法（レーザヘッド）	TBD

製品検索

PRODUCTS

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QCW Kalama
(193 nm/ 200mW)