PRODUCTS

Laser
CW laser
The Frequad series is a 266 nm deep-ultraviolet (DUV) continuous-wave (CW), single-frequency wavelength-conversion laser with a history of more than 20 years. Stable CW operation is achieved using our high-reliability wavelength-conversion module and our proprietary high-speed, precision voice-coil motor (VCM) laser. You can choose from three types (Frequad-HP, Frequad-M, Frequad-C) according to the desired output.
(1) Compact enclosure
No water cooling or dry-air supply is required. The compact enclosure requires no setup.
※Volume of the laser head is 1/10 that of our Frequad-M product (for comparison).
(2) Long-term stable output and beam quality
OXIDE’s proprietary ultra-high-purity BBO crystals deliver outstanding quality, providing an expected lifetime of over 10,000 hours. Because the crystals exhibit minimal degradation, high beam quality and long-term stable operation are ensured.
(3) Refined servo-lock technology
Our proprietary servo-lock technology, using a high-speed, high-precision voice coil motor (VCM), guarantees stable operation.
(4) Low power consumption
The high-efficiency wavelength-conversion laser system enables very low power consumption.
| CW/Pulse | CW |
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| Wavelength | 266 nm |
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| Output | 20 mW |
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| Line width | < 0.005 pm |
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| Output stability | < +/-3%/8 hrs |
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| Extinction ratio | > 100:1 |
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| Beam quality | TEM00, M2 < 1.3 |
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| Polarization direction | Vertical, Linear |
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| Beam diameter | 0.8 mm ±0.2 mm |
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| Divergence angle | < 0.4 mrad |
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| Power Supply | AC 100-240 V, 50/60 Hz |
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| Power Consumption | < 70 W |
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| Cooling | Air |
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| Dimensions (Head) | 153 x 202 x 79 mm |
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| Usage | Semiconductor Inspection |
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PRODUCTS
Contact
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