QCW Kalama
(193 nm/ 200mW)

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QCW Kalama
(193 nm/ 200mW)

QCW Kalama<br />(193 nm/ 200mW)

Laser

Picosecond Lasers

This is an all-solid-state deep-ultraviolet picosecond laser achieving a wavelength of 193 nm, a repetition rate of 50 MHz and an average output exceeding 0.2 W.
By utilising the wavelength conversion technology and high-quality CLBO crystals that we have developed over many years, we have succeeded in achieving both high output and short wavelengths in an all-solid-state laser.
In addition to conventional wafer inspection, it can be applied to photomask inspection for ArF lithography, the medical field, and as a light source for optical component inspection.

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Specification

CW/Pulse

Pulse

Wavelength

193 nm

Output

200 mW

Extinction ratio

> 100:1

Beam quality

M2 < 1.5

Polarization direction

Horizontal

Beam diameter

3 mm ±0.3 mm

Power Supply

AC 200-240 V, 50/60 Hz

Power Consumption

< 3 kW

Cooling

Water

Dimensions (Head)

TBD

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