CW DUV Laser


Product Overview

CW DUV Laser Frequad Series is a laser that can generate laser of new wavelength, developed based on Frequad-HP, Frequad-M, and Frequad-C technology of deep-ultraviolet (DUV) wavelength (266nm) continuous wave (CW) single frequency wavelength conversion laser which has more than 20 years of history. Nonlinear crystal and servo locking technology developed through the 266 nm Frequad Series enable generation of stable and long-life CW operation. According to your needs, OXIDE can propose CW lasers of various wavelengths.

Product Chart



・Highly reliable nonlinear optical crystal

Depending on the wavelength, we can propose most suitable nonlinear wavelength conversion crystal. For instance, with OXIDE’s outstanding quality, BBO crystals can offer a single-spot life-time of over 3000 hours at 266nm and output power 1W. Furthermore, the little deterioration of the crystal assures stable operation for a long period of time.

・Sophisticated servo lock technology

OXIDE’s unique high-speed, high-precision voice coil motor (VCM) servo actuator offers stable CW operation of laser.


Frequad-W (213 nm)

A new wavelength is added to the CW DUV Frequad Series – 213nm wavelength at 10mW output power. By utilizing conventional platform of Frequad Series, long-life and high reliability of equivalent level have been attained.



Model Frequad-* Frequad-W
Wavelength 400…205 nm 213 nm
Output power ** W 10 mW
Linewidth < 0.005 pm < 0.005 pm
Extinction Ratio > 100:1 > 100:1
Beam Quality TEM00 TEM00
Polarization Vertical, Linear Vertical, Linear
Power Supply AC 100-240V, 50/60Hz AC 100-240V, 50/60Hz
Power Consumption < 340 W < 300 W
Cooling ** Air
Dimensions (Head) ** 240 x 840 x 160 mm

※Customization available upon request.



  • Semiconductor inspection
  • Raman spectroscopy
  • Photoluminescence
  • Disk mastering
  • Fiber bragg grating