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CW 266 nm DUV Laser

Product Overview

CW 266 nm DUV Laser Frequad Series is a deep-ultraviolet (DUV) wavelength (266 nm) continuous-wave (CW) single frequency wavelength laser which has more than 20 years of history. OXIDE’s highly reliable wavelength conversion module and unique high-speed, precision voice coil motor (VCM) laser enables stable operation of CW. Depending on the output power, you can select suitable operation from three types – Frequad-HP, Frequad-M, and Frequad-C.

 

 

Features

・Ultra-high purity BBO crystal

The outstanding quality of OXIDE’s own BBO crystal provides over 3000 hours single-spot lifetime at 1W output power, and over 1000 hours at 2W. Furthermore, the little deterioration of the crystal assures stable operation for a long period of time at high beam quality.

・Sophisticated servo lock technology

OXIDE’s unique high-speed, high-precision voice coil motor (VCM) servo actuator offers stable CW operation of laser.

・Low power consumption

The highly efficient wavelength conversion laser system realized extremely low power consumption – less than 340W.

 

Specifications

Model Frequad-HP
FQ50-20/-10		 Frequad-M
FQM-10/-07/-05/-03		 Frequad-C
FQC-50/-20
 
Wavelength 266 nm 266 nm 266 nm
Output power 2.0/1.0 W 1.0/0.7/0.5/0.3 W 50/20 mW
Linewidth < 0.005 pm < 0.005 pm < 0.005 pm
Power Stability < +/-1 %/8 hrs < +/-1 %/8 hrs < +/-3 %/8 hrs
Extinction Ratio > 100:1 > 100:1 > 100:1
Beam Quality TEM00, M2 < 1.2 TEM00, M2 < 1.2 TEM00, M2 < 1.3
Polarization Vertical, Linear Vertical, Linear Vertical, Linear
Beam Diameter 3 mm ±0.3 mm 3 mm ±0.3 mm 0.8 mm ±0.2 mm
Divergence (1/e2) < 0.2 mrad < 0.2 mrad < 0.4 mrad
Power Supply AC 100-240V
50/60Hz		 AC 100-240V
50/60Hz 		AC 100-240V
50/60Hz
Power Consumption < 300 W < 340 W < 70 W
Cooling Air Water Air
Dimensions (Head) 240 x 840 x 160 mm 350 x 590 x 124 mm 153 x 202 x 79 mm

 

Applications

  • Semiconductor inspection
  • Raman spectroscopy
  • Photoluminescence
  • Disk mastering
  • Fiber bragg grating

 

Technical Documents:
Frequad Series(EN)_20221224.pdf