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High beam quality & Long lifetime UV/DUV Femtosecond Laser for Microprocessing ORIGAMI 03XPS/02XPS

Product Overview

ORIGAMI 03XPS/02XPS is an all-in-one, microjule, femtosecond UV/DUV laser with world’s premiere reliability in UV/DUV output designed for precision micromachining. High beam quality and long lifetime of UV/DUV are achieved by OXIDE’s highest quality crystals used in the frequency conversion module. The fundamental laser, Origami XP of NKT Photonics, provides clean mode-locked pulses, superior beam quality and power stability, and unprecedented beam pointing stability by virtue of its monolithic system design (Optocage™). Thus, the laser system is capable of 24/7 operation in demanding industrial environment.

ORIGAMI 03XPS-3P/02XPS-3P has triple output port (1030/515/343 nm or  1030/515/258 nm) suitable for flexible laser processing of various materials. The output wavelength can be switched via GUI application or terminal command of PC. Fast wavelength switching within 1 second is possible while laser emission.

ORIGAMI 03XPS-2P/02XPS-2P is the compact model with dual output port (1030/343 nm or 1030/258 nm) with smaller footprint.

 

Features & Benefits

  • High beam quality (M2 < 1.3) and long lifetime of UV/DUV achieved by OXIDE’s highest quality crystal
  • Excellent beam pointing stability (< 5 µrad /℃) by virtue of monolithic laser design (Optocage™)
  • Fast (<1 sec) & flexible wavelength switching for efficient processing of various materials
  • User friendly GUI or programmable command control
  • Air-cooled, single box for ease of integration

 

Applications

Application fields of ORIGAMI 03XP/02XP include:

  • µLED, OLED, and LCD repair and lift-off
  • Flexible PCB processing
  • Photomask repair
  • Marking of SiC, GaN wafers
  • Fiber Bragg Gratings (FBGs) manufacturing
  • Biomedical device manufacturing

 

Specifications

Model 03XP-S-3P 02XP-S-3P
Port IR GR UV IR GR DUV
Center wavelength [nm] 1030 515 343 1030 515 258
Nominal repetition rate [kHz] 50
Pulse selection options Single-shot to 1MHz, Pulse-on-Demand
Pulse duration [fs] < 400 < 350 < 300 < 400
Average power [W] > 3.3 > 1.5 > 1 > 3.3 > 1.5 > 0.45
Pulse energy [μJ] > 66 > 30 > 20 > 66 > 30 > 9
Beam quality (TEM00) ≤ 1.2 ≤ 1.3 ≤ 1.3 ≤ 1.2 ≤ 1.3 ≤ 1.3
Pointing stability
(18-28 ℃) [urad/℃] rms		 < 5
Notes All parameters are specified at Nominal repetition rate

Please refer to the datasheet for other specifications. As options, optimizing the maximum average power at a specific repetition rate, increasing max power/pulse energy, and changing beam diameters can be available upon customer request.

 

Links

 

※OXIDE is an exclusive distributor of Ultrashort Pulse UV Laser manufactured by NKT Photonics in Japan.